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Vacuum equipment

Evaporation System (3 chanel)

조회 수 9723 추천 수 0 2013.03.08 13:54:33

Vacuum Evaporation System

 

Deposition Source: Thermal Evaporation (Tungsten Boat)

                                3 Chanel selection availible

 

Thickness monitor: 1 Chanel

 

Pumping System: Turbo pump and Rotary pump

 

Substrate: Rotation.

 

Control: PLC

 

Ultimate pressure: 3 x 10-6 torr

 

 

 

 EVA 01.jpg

 EVA 02.jpgEVA 03.jpg1362660931214.jpg

 

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