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Thickness Monitor (QCM)

EON-ID Series (QCM Thickness controller)

조회 수 26553 추천 수 0 2014.11.19 19:31:55



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Drawing from its extensive background in the design and manufacture of cutting-edge thin
film technology, Colnatec introduces a new film thickness controller that packages an
ultra-high resolution deposition control system into a compact, rackmountable enclosure.
With its integrated display and onboard recipe-driven software, Eon-ID™ is the only product of its
kind that works right out of the box.




- Air cooling 방식의 Head Sensor에는 K-type 온도센서가 장착.

- Sensor Head와 Crystal sensor의 선택에 따라서 고온에서도 정밀한 막두께의 측정 및 제어가 가능합니다.



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» EON-ID Series (QCM Thickness controller) file jpmaterials 2014-11-19 26553
1 Millennium™ Controller file jpmaterials 2014-02-11 21694